SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.

Patent Owner

Watch Compare Add to Portfolio

Stats

Details

Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 2183
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 7355
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 691
 
  
 
H02K DYNAMO-ELECTRIC MACHINES 6101
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS495
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 3202
 
  
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 291
 
  
 
F16C SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OF CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS 268
 
  
 
F16D COUPLINGS FOR TRANSMITTING ROTATION 190
 
  
 
F16F SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION158

Top Patents (by citation)

Upgrade to the Professional Level to View Top Patents for this Owner. Learn More

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0373,580 SIX-DEGREE-OF-FREEDOM LINEAR MOTORDec 30, 15Dec 28, 17[H02K]
2017/0345,696 WAFER PROCESSING DEVICE AND METHOD THEREFORNov 24, 15Nov 30, 17[H01L]
2017/0144,251 LASER ANNEALING DEVICEJul 03, 15May 25, 17[H01L, B23K]
2016/0380,524 FLAT VOICE COIL MOTORNov 07, 14Dec 29, 16[H02K]
2016/0327,875 FOCUSING LEVELING DEVICEDec 24, 14Nov 10, 16[G03F]
2015/0357,217 WARPED SILICON-CHIP ADSORPTION DEVICE AND ADSORPTION METHOD THEREOFDec 26, 13Dec 10, 15[H01L, G03F]
2013/0293,859 LARGE FIELD PROJECTION OBJECTIVE FOR LITHOGRAPHYDec 07, 11Nov 07, 13[G03F]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9893596 Magnetic alignment system and alignment method thereforJan 22, 14Feb 13, 18[H02K]
9857702 Focusing leveling deviceDec 24, 14Jan 02, 18[G03F]
9760022 Lithography machine workpiece table and vertical position initialization method thereofFeb 12, 15Sep 12, 17[G03B, G03F]
9760025 Reticle shape regulation device and method, and exposure apparatus using sameJun 10, 14Sep 12, 17[G03F]
9755493 Linear motor and stage apparatusJul 02, 13Sep 05, 17[H02K]
9588444 Balance mass system shared by workpiece table and mask table, and lithography machineSep 23, 13Mar 07, 17[F16F, G03F]
9519231 Method for measuring and calibrating centroid of coarse stage of photolithography toolApr 28, 12Dec 13, 16[G03F]
9455164 Laser annealing apparatus and laser annealing methodJul 19, 13Sep 27, 16[H01L, B23K, H01S]
9256138 Method for measuring distortion of projection objectiveMar 21, 12Feb 09, 16[G03F]
9195146 Interference exposure device and methodAug 16, 12Nov 24, 15[G01B, G03F]

View all patents..

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2014/0248,273 VACCINE BASED ON STAPHYLOCOCCAL SUPERANTIGEN-LIKE 3 PROTEIN (SSL3)AbandonedSep 07, 12Sep 04, 14[A61K]

Top Inventors for This Owner

Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More

We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!

We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.